Multi-Wafer Rotating MEMS Machines

Turbines, Generators, and Engines

  • Jeffrey Lang

Part of the MEMS Reference Shelf book series (MEMSRS)

Table of contents

  1. Front Matter
    Pages i-xv
  2. Alan H. Epstein
    Pages 1-8
  3. S. Mark Spearing
    Pages 33-55
  4. Hanqing Li, Martin Schmidt
    Pages 57-156
  5. David P. Arnold, Mark G. Allen
    Pages 157-190
  6. Zoltán S. Spakovszky
    Pages 191-278
  7. Stuart A. Jacobson
    Pages 279-323
  8. Jeffrey H. Lang, Sauparna Das
    Pages 325-404
  9. C.M. Spadaccini, I.A. Waitz
    Pages 405-452
  10. Back Matter
    Pages 453-456

About this book


Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park.

The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fabrication technologies. Thus, the project sought to develop a fuel-burning jet engine that would drive an electric generator to produce electric power for general purpose use.  Along the way, the project would advance the science and engineering of many disciplines from the MEMS perspective.

The Micro Engine Project was by its very nature a highly mult-disciplinary project pursuing advances in materials, structures, fabrication, combustion, heat transfer, turbomachinery, bearings and electromechanics, all at the MEMS scale.  Many of these topics are addressed in this volume, including:

materials structures and packaging

multi-wafer MEMS fabrication and and bonding technologiesElectroplating magnetic components

electroplating magnetic structures into silicon

very-high-speed air bearings

thermofluids and turbomachinery

electric and magnetic generators


About The MEMs Reference Shelf:

"The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner."

Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus


Generator MIT gas turbine engine Motor Sensor Wafer combustion electrical engineering gas turbine material materials selection microelectromechanical system (MEMS) microsystems power MEMS device sensors turbomachinery

Editors and affiliations

  • Jeffrey Lang
    • 1
  1. 1.Dept. Electrical Engineering &Massachusetts Institute of TechnologyCambridgeU.S.A.

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag US 2010
  • Publisher Name Springer, Boston, MA
  • eBook Packages Engineering Engineering (R0)
  • Print ISBN 978-0-387-77746-7
  • Online ISBN 978-0-387-77747-4
  • Series Print ISSN 1936-4407
  • Buy this book on publisher's site