Optimal Synthesis Methods for MEMS

  • G. K. Ananthasuresh

Part of the Microsystems book series (MICT, volume 13)

Table of contents

  1. Front Matter
    Pages i-xiii
  2. G. K. Ananthasuresh
    Pages 1-12
  3. Anupam Saxena, G. K. Ananthasuresh
    Pages 13-42
  4. Wenjing Ye, Subrata Mukherjee
    Pages 43-77
  5. G. K. Ananthasuresh
    Pages 79-119
  6. Emílio Carlos Nelli Silva
    Pages 121-153
  7. Emílio Carlos Nelli Silva
    Pages 155-191
  8. Ole Sigmund
    Pages 193-221
  9. Carlos Mastrangelo, Edwin Carlen
    Pages 223-265
  10. Radha Sarma, G. K. Ananthasuresh
    Pages 267-295
  11. Tamal Mukherjee, Gary K. Fedder
    Pages 297-316
  12. Back Matter
    Pages 317-320

About this book


The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process ­ In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.


Motor Potential Transducer design electricity finite element method logic manufacturing material microelectromechanical system (MEMS) model modeling piezoelectricity simulation software

Authors and affiliations

  • G. K. Ananthasuresh
    • 1
  1. 1.University of PennsylvaniaPhiladelphiaUSA

Bibliographic information

  • DOI
  • Copyright Information Kluwer Academic Publishers 2003
  • Publisher Name Springer, Boston, MA
  • eBook Packages Springer Book Archive
  • Print ISBN 978-1-4613-5101-6
  • Online ISBN 978-1-4615-0487-0
  • Series Print ISSN 1389-2134
  • Buy this book on publisher's site