Precision Nanometrology

Sensors and Measuring Systems for Nanomanufacturing

  • Wei Gao

Part of the Springer Series in Advanced Manufacturing book series (SSAM, volume 0)

About this book


Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines.

The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems.

Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.

The Springer Series in Advanced Manufacturing publishes the best teaching and reference material to support students, educators and practitioners in manufacturing technology and management. This international series includes advanced textbooks, research monographs, edited works and conference proceedings covering all subjects in advanced manufacturing. The series focuses on new topics of interest, new treatments of more traditional areas and coverage of the applications of information and communication technology (ICT) in manufacturing.


Laser REM STEM algorithm instruments linear optimization metrology nanometrology nanotechnology semiconductor sensor

Authors and affiliations

  • Wei Gao
    • 1
  1. 1.School of Engineering, Department of NanomechanicsTohoku UniversityAoba-ku, SendaiJapan

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag London 2010
  • Publisher Name Springer, London
  • eBook Packages Engineering Engineering (R0)
  • Print ISBN 978-1-84996-253-7
  • Online ISBN 978-1-84996-254-4
  • Series Print ISSN 1860-5168
  • Buy this book on publisher's site