Fast Simulation of Electro-Thermal MEMS

Efficient Dynamic Compact Models

  • Tamara Bechtold
  • Evgenii B. Rudnyi
  • Jan G. Korvink

Table of contents

About this book


Fast Simulation of Electro-Thermal MEMS provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. Emphasis is placed on the application of the Arnoldi method for effective order reduction of thermal systems. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.


Arnoldi algorithm Electro-thermal simulation MEMS Model order reduction Software development environment microelectromechanical system (MEMS) microsystems model simulation

Authors and affiliations

  • Tamara Bechtold
    • 1
  • Evgenii B. Rudnyi
    • 1
  • Jan G. Korvink
    • 1
  1. 1.Institut für MikrosystemtechnikUniversiät FreiburgFreiburgGermany

Bibliographic information

  • DOI
  • Copyright Information Springer-Verlag Berlin Heidelberg 2007
  • Publisher Name Springer, Berlin, Heidelberg
  • eBook Packages Engineering Engineering (R0)
  • Print ISBN 978-3-540-34612-8
  • Online ISBN 978-3-540-34613-5
  • Buy this book on publisher's site