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Thin Film Deposition Techniques (PVD)

  • E. Steinbeiss
Chapter
Part of the Lecture Notes in Physics book series (LNP, volume 569)

Abstract

The most interesting materials for spin electronic devices are thin films of magnetic transition metals and magnetic perovskites, mainly the doped La-manganites [1] as well as several oxides and metals for passivating and contacting the magnetic films. The most suitable methods for the preparation of such films are the physical vapor deposition methods (PVD). Therefore this report will be restricted to these deposition methods.

Keywords

Energetic Particle Physical Vapor Deposition Target Atom Evaporation Source Molecular Beam Epitaxy Growth 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2001

Authors and Affiliations

  • E. Steinbeiss
    • 1
  1. 1.Institut für Physikalische Hochtechnologie Jena e.V.JenaGermany

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