Fabrication of Microscale Rotating Magnetic Machines

  • David P. Arnold
  • Mark G. Allen
Part of the MEMS Reference Shelf book series (MEMSRS)


In this chapter, microfabrication techniques are discussed to enable miniaturized magnetic machines for use with silicon microturbomachinery. These rotational machines could be used as either motors (for motoring or fluidic pumping) or as generators for electrical power generation. Challenges and methods for microfabricating microscale magnetic machines are described, and examples of previously implemented devices are discussed.


Permanent Magnet Metal Layer Seed Layer Eddy Current Loss Wafer Bonding 
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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  • David P. Arnold
    • 1
  • Mark G. Allen
    • 2
  1. 1.Department of Electrical and Computer EngineeringUniversity of FloridaGainesvilleUSA
  2. 2.School of Electrical and Computer EngineeringGeorgia Institute of TechnologyAtlantaUSA

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