Solid Surfaces, Interfaces and Thin Films pp 129-216 | Cite as

# Scattering from Surfaces and Thin Films

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## Abstract

The kinematic and the dynamic scattering theory for surfaces and thin films are presented. Elastic scattering is treated in the context of low energy electron diffraction (LEED) and reflection high energy electron reflection (RHEED). Inelastic scattering of electrons is described in the context of electron energy loss (EELS) and high-resolution electron energy loss spectroscopy (HREELS). Its approximate theoretical description by dielectric theory is also supplied. As important standard characterisation techniques for thin films and multilayer systems X-ray diffraction (XRD) and ion scattering, in particular Rutherford backscattering (RBS), are described together with instructive experimental examples.

## Keywords

Scatter Cross Section Electron Energy Loss Spectrum Ewald Sphere Specular Direction Dielectric Theory## Supplementary material

## References

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