Summary and Conclusions

  • Ian W. Boyd
Part of the Springer Series in Materials Science book series (SSMATERIALS, volume 3)


Previous chapters have described in detail the various mechanisms by which thin dielectric films can be formed and patterned by laser beams. In this chapter, we discuss and compare the growth rates and physical properties of these layers. Since laser processing can also be extended to semiconducting, conducting, and superconducting films, we also discuss and assess the potential applications of the technology to specific device-oriented fields.


Laser Processing Thermally Grown Oxide Breakdown Strength Direct Writing Grown Oxide 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag Berlin Heidelberg 1987

Authors and Affiliations

  • Ian W. Boyd
    • 1
  1. 1.Department of Electronic and Electrical EngineeringUniversity College LondonLondonUK

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