Quartz and MEM Resonators

  • Eric VittozEmail author
Part of the Integrated Circuits and Systems book series (ICIR, volume 0)


As illustrated by Fig. 2.1(a), a quartz resonator is essentially a capacitor, the dielectric of which is silicon dioxide (SiO2), the same chemical compound as used in integrated circuits. However, instead of being a glass, it is a monocrystal, a quartz crystal, which exhibits piezoelectric properties. Therefore, a part of the electrical energy stored in the capacitor is converted into mechanical energy.


Equivalent Circuit Piezoelectric Property Electrical Capacitance Bias Voltage Versus Limit Voltage 
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© Springer Science+Business Media B.V. 2010

Authors and Affiliations

  1. 1.Ecole Polytechnique Fédérale de Lausanne (EPFL)LausanneSwitzerland

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