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Quartz and MEM Resonators

  • Eric VittozEmail author
Chapter
  • 1.4k Downloads
Part of the Integrated Circuits and Systems book series (ICIR, volume 0)

Abstract

As illustrated by Fig. 2.1(a), a quartz resonator is essentially a capacitor, the dielectric of which is silicon dioxide (SiO2), the same chemical compound as used in integrated circuits. However, instead of being a glass, it is a monocrystal, a quartz crystal, which exhibits piezoelectric properties. Therefore, a part of the electrical energy stored in the capacitor is converted into mechanical energy.

Keywords

Equivalent Circuit Piezoelectric Property Electrical Capacitance Bias Voltage Versus Limit Voltage 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media B.V. 2010

Authors and Affiliations

  1. 1.Ecole Polytechnique Fédérale de Lausanne (EPFL)LausanneSwitzerland

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