Quartz and MEM Resonators
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As illustrated by Fig. 2.1(a), a quartz resonator is essentially a capacitor, the dielectric of which is silicon dioxide (SiO2), the same chemical compound as used in integrated circuits. However, instead of being a glass, it is a monocrystal, a quartz crystal, which exhibits piezoelectric properties. Therefore, a part of the electrical energy stored in the capacitor is converted into mechanical energy.
KeywordsEquivalent Circuit Piezoelectric Property Electrical Capacitance Bias Voltage Versus Limit Voltage
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- 9.F.E. Terman, Radio Engineering HandBook, McGraw-Hill, 1943.Google Scholar
- 10.E. Momosaki, ”A Brief Review of Progress in Quartz Tuning Fork Resonators”, Proceedings of the 1997 IEEE International Frequency Control Symposium, 1997, pp. 552-565, 28-30 May 1997.Google Scholar
- 12.J. Hermann,”A Novel Miniature ZT-Cut Resonator”, Proc. of the 39th Annual Symposium on Frequency Control, 1085, pp. 375-380.Google Scholar