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Introduction to Precision Machines

  • Shuming YangEmail author
  • Guofeng Zhang
  • Changsheng Li
  • Zhuangde Jiang
Reference work entry
  • 27 Downloads
Part of the Precision Manufacturing book series (PRECISION)

Abstract

Ultra-precision machining is an advanced technology used to generate parts with high accuracy, low surface roughness and surface/subsurface damage to meet the requirements of astronomy, semiconductor technology, consumer electronics, etc. The application in some representative fields was described to clarify the concrete requirements for ultra-precision machining. The state of the art of three widely used ultra-precision machining processes including ultra-precision cutting, ultra-precision grinding and finishing/figuring is discussed.

Keywords

Precision machines Manufacturing Measurement 

References

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Copyright information

© Springer Nature Singapore Pte Ltd. 2020

Authors and Affiliations

  • Shuming Yang
    • 1
    Email author
  • Guofeng Zhang
    • 2
  • Changsheng Li
    • 1
  • Zhuangde Jiang
    • 1
  1. 1.State Key Laboratory for Manufacturing Systems EngineeringXi’an Jiaotong UniversityXi’anChina
  2. 2.State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical EngineeringXi’an Jiaotong UniversityXi’anChina

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